Vratzov, B: search on Z-Library

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1

Wafer scale patterning by soft UV-Nanoimprint Lithography

U. Plachetka, M. Bender, A. Fuchs, B. Vratzov, T. Glinsner, F. Lindner, H. Kurz

Journal:

Microelectronic Engineering

Year:

2004

Language:

english

File:

PDF, 316 KB

english, 2004

2

Nanostructured Polymer Brushes by UV-Assisted Imprint Lithography and Surface-Initiated Polymerization for Biological Functions

Edmondo M. Benetti, Canet Acikgoz, Xiaofeng Sui, Boris Vratzov, Mark A. Hempenius, Jurriaan Huskens, G. Julius Vancso

Journal:

Advanced Functional Materials

Year:

2011

Language:

english

File:

PDF, 642 KB

english, 2011

3

Fabrication of nanostructures using a UV-based imprint technique

M. Bender, M. Otto, B. Hadam, B. Vratzov, B. Spangenberg, H. Kurz

Journal:

Microelectronic Engineering

Year:

2000

Language:

english

File:

PDF, 888 KB

english, 2000

4

A common gate thin film transistor on poly(ethylene naphthalate) foil using step-and-flash imprint lithography

P.F. Moonen, B. Vratzov, W.T.T. Smaal, G.H. Gelinck, M. Péter, E.R. Meinders, J. Huskens

Journal:

Organic Electronics

Year:

2011

Language:

english

File:

PDF, 893 KB

english, 2011

5

Flexible thin-film transistors using multistep UV nanoimprint lithography

Pieter F. Moonen, Boris Vratzov, Wiljan T.T. Smaal, B.K. Charlotte Kjellander, Gerwin H. Gelinck, Erwin R. Meinders, Jurriaan Huskens

Journal:

Organic Electronics

Year:

2012

Language:

english

File:

PDF, 1.31 MB

english, 2012

6

Fabrication of 12 nm electrically variable shallow junction metal–oxide–semiconductor field effect transistors on silicon on insulator substrates

W. Henschel, T. Wahlbrink, Y. M. Georgiev, M. Lemme, T. Mollenhauer, B. Vratzov, A. Fuchs, H. Kurz

Year:

2003

Language:

english

File:

PDF, 977 KB

english, 2003

7

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Emerging Lithographic Technologies XII - Integration issues in step and repeat UV nanoimprint lithography

Charpin-Nicolle, C., Schellenberg, Frank M., Irmscher, M., Pritschow, M., Vratzov, B., van Vossen, H., Chiaroni, J., Massin, J., Gubbini, P.

Year:

2008

Language:

english

File:

PDF, 1.05 MB

english, 2008

8

Electrical characterization of 12 nm EJ-MOSFETs on SOI substrates

W. Henschel, T. Wahlbrink, Y.M. Georgiev, M. Lemme, T. Mollenhauer, B. Vratzov, A. Fuchs, H. Kurz, M. Kittler, F. Schwierz

Journal:

Solid-State Electronics

Year:

2004

Language:

english

File:

PDF, 569 KB

english, 2004

9

Ultrahigh-frequency surface acoustic wave generation for acoustic charge transport in silicon

Büyükköse, S., Vratzov, B., van der Veen, J., Santos, P. V., van der Wiel, W. G.

Journal:

Applied Physics Letters

Year:

2013

Language:

english

File:

PDF, 1.64 MB

english, 2013

10

Ultrahigh-frequency surface acoustic wave transducers on ZnO/SiO 2 /Si using nanoimprint lithography

Büyükköse, S, Vratzov, B, Ataç, D, van der Veen, J, Santos, P V, van der Wiel, W G

Journal:

Year:

2012

Language:

english

File:

PDF, 3.29 MB

english, 2012

11

High-frequency acoustic charge transport in GaAs nanowires

Büyükköse, S, Hernández-Mínguez, A, Vratzov, B, Somaschini, C, Geelhaar, L, Riechert, H, van der Wiel, W G, Santos, P V

Journal:

Year:

2014

Language:

english

File:

PDF, 2.89 MB

english, 2014

12

Nanoscale Patterning by UV Nanoimprint Lithography Using an Organometallic Resist

Acikgoz, Canet, Vratzov, Boris, Hempenius, Mark A., Vancso, G. Julius, Huskens, Jurriaan

Journal:

ACS Applied Materials & Interfaces

Year:

2009

Language:

english

File:

PDF, 1.53 MB

english, 2009

13

High-quality global hydrogen silsequioxane contact planarization for nanoimprint lithography

Büyükköse, Serkan, Vratzov, Boris, van der Wiel, Wilfred G.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2011

Language:

english

File:

PDF, 1.11 MB

english, 2011

14

Triple-gate metal–oxide–semiconductor field effect transistors fabricated with interference lithography

Lemme, M C, Moormann, C, Lerch, H, Möller, M, Vratzov, B, Kurz, H

Journal:

Year:

2004

Language:

english

File:

PDF, 407 KB

english, 2004

15

Large scale ultraviolet-based nanoimprint lithography

B. Vratzov, A. Fuchs, M. Lemme, W. Henschel, H. Kurz

Year:

2003

Language:

english

File:

PDF, 1.03 MB

english, 2003

16

High resolution lithography with PDMS molds

M. Bender, U. Plachetka, J. Ran, A. Fuchs, B. Vratzov, H. Kurz, T. Glinsner, F. Lindner

Year:

2004

Language:

english

File:

PDF, 865 KB

english, 2004

17

Fabrication and characterization of free-standing, high-line-density transmission gratings for the vacuum UV to soft X-ray range

Goh, S.J., Bastiaens, H.J.M., Vratzov, B, Huang, Q., Bijkerk, F., Boller, K.J.

Journal:

Year:

2015

Language:

english

File:

PDF, 1.99 MB

english, 2015

18

SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 21 August 2011)] Advances in X-Ray/EUV Optics and Components VI - Improved resolution for soft-x-ray monochromatization using lamellar multilayer gratings

van der Meer, R., Morawe, Christian, Khounsary, Ali M., Krishnan, B., Kozhevnikov, I. V., Goto, Shunji, De Boer, M. J., Vratzov, B., Bastiaens, H. M. J., Huskens, J., van der Wiel, W. G., Hegeman, P.

Year:

2011

Language:

english

File:

PDF, 2.71 MB

english, 2011

19

SPIE Proceedings [SPIE Photomask Technology 2005 - Monterey, California (Monday 3 October 2005)] 25th Annual BACUS Symposium on Photomask Technology - Template manufacturing for nanoimprint lithography using existing infrastructure

Irmscher, Mathias, Weed, J. Tracy, Martin, Patrick M., Butschke, Joerg, Hess, Guenter, Letzkus, Florian, Renno, Markus, Sailer, Holger, Schulz, Hubert, Schwersenz, Anatol, Thompson, Ecron, Vratzov, Bo

Year:

2005

Language:

english

File:

PDF, 2.07 MB

english, 2005

20

Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range

van der Meer, Robert, Kozhevnikov, Igor, Krishnan, Balachander, Huskens, Jurriaan, Hegeman, Petra, Brons, Christian, Vratzov, Boris, Bastiaens, Bert, Boller, Klaus, Bijkerk, Fred

Journal:

Year:

2013

Language:

english

File:

PDF, 614 KB

english, 2013